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CIGS İnce Film Yüzeyindeki Morfolojik Farklılıkların GLCM Görüntü İşleme Yöntemi ile İncelenmesi

Yıl 2022, Cilt: 17 Sayı: 2, 460 - 477, 25.11.2022
https://doi.org/10.29233/sdufeffd.1125106

Öz

Çalışmada Mo folyolar ve cam üzerine DC saçtırma yöntemiyle kaplanmış Mo ince filmler üzerine aynı anda termal buharlaştırma metoduyla CIGS yarıiletken malzemesi biriktirilmiştir. İki grup Mo alt katmanların AFM cihazı ile topoğrafyaları ve ortalama yüzey pürüzlülükleri elde edilmiştir. CIGS ince filmlerin kalınlıkları SEM cihazı ile kesit görüntüleri alınarak, 1,122 µm olarak tespit edilmiştir. Numunelerin XRD ölçümleri alınarak yapısal farklılıkları belirlenmiştir. Mo folyo ve ince film alt katmanı üzerine biriktirilen CIGS ince filmlerin yüzeyinden 5000, 10000, 25000 ve 50000 büyütmelerde SEM görüntüleri alınmıştır. Elde edilen SEM görüntülerinin GLCM metodu ile Haralick doku özellikleri incelenmiş, elde edilen sonuçlar değerlendirilerek alt katman Mo topoğrafyasının CIGS ince filmlerin morfolojisi üzerine etkisi araştırılmıştır. Hesaplanan Haralick doku özelliklerinin görece geniş alanlardan daha küçük alanlara doğru değişimleri değerlendirilmiştir. A grubu numunelerden elde edilen görüntülerde enerji değerinin 0,21 ile 0,54 arasında, karşıtlık değerinin 0,15 ile 0,35 arasında, korelasyon değerinin 0,66 ile 0,65 arasında ve homojenite değerinin 0,82 ile 0,92 arasında değiştikleri tespit edilmiştir. B grubunda aynı doku özelliklerinin farklılık gösterdiği görülmüştür. Alttaş farklılığının yapı ve morfoloji üzerine etkisi, SEM görüntülerinin doku özellikleri farklılıkları ile açıklanmıştır.

Teşekkür

Bu makalenin yazarlarından Celal Alp YAVRU’ ya 100/2000 Doktora Programı kapsamında destek veren Yükseköğrenim Kurumu (YÖK)’ na teşekkür ederiz.

Kaynakça

  • H. Endo, M. Mitsuishi, and T. Miyashita, “Free-standing ultrathin films with universal thickness from nanometer to micrometer by polymer nanosheet assembly,” J. Mater. Chem., 18 (12), 1302–1308, 2008.
  • P. Heremans, A. Tripathi, A. de Jamblinne de Meux, C. P. E. Smiths, B. Hou, G. Pourtois, and H. G. Gelinck, “Mechanical and electronic properties of thin-film transistors on plastic, and their ıntegration in flexible electronic applications,” Adv. Mater., 28 (22), 4266–4282, 2016.
  • A. Moldovan, M. Enăchescu, A. A. Popescu, M. Mihăilescu, C. Neguţu, l. Baschir, G. C. Vasile, D. Savastru, M. S. Iovu, V. I. Verlan, O. T. Bordian, I. M. Vasıle, and N. N. Puşcaş, “Characterization of As2S3 thin surface films using sem and afm methods,” U.P.B. Sci. Bull., Series A, 76 (2), 215-222, 2014
  • M. C. Baykul and A. Balcioglu, “AFM and SEM studies of CdS thin films produced by an ultrasonic spray pyrolysis method,” Microelectron. Eng., 52 (1), 703–713, 2000.
  • B. R. Kumar ve T. S. Rao, “AFM studies on surface morphology, topography and texture of nanostructured zinc aluminum oxide thin films,” Dig. J. Nanomater., 7 (4), 1881-1889, 2012.
  • M. Kaleli, D. A. Aldemir, A. B. Bayram, ve C. A. Yavru, “Ultrasonik sprey piroliz ile üretilen flor katkılı kalay oksit ince filmlerin yapısal, morfolojik, optiksel ve elektriksel analizleri,” Düzce Üniversitesi Bilim ve Teknoloji Dergisi, 7 (3), 2107–2115, 2019.
  • T. Wada, Y. Hashimoto, S. Nishiwaki, T. Satoh, S. Hayashi, T. Negami, H. Miyake, “High-efficiency CIGS solar cells with modified CIGS surface,” Sol. Energ. Mat. Sol. C., 67 (14), 305–310, 2001.
  • T. P. Kumar, S. Saravanakumar, and K. Sankaranarayanan, “Effect of annealing on the surface and band gap alignment of CdZnS thin films,” Appl. Surf. Sci., 257 (6), 1923–1927, 2011.
  • N. E. I. Boukortt, S. Patanè, M. Adouane, and R. AlHammadi, “Numerical optimization of ultrathin CIGS solar cells with rear surface passivation,” Sol. Energy, 220 (1), 590–597, 2021.
  • S. W. Meeks, W. E. Weresin, and H. J. Rosen, “Optical surface analysis of the head-disk-interface of thin film disks,” Transactions of the ASME, 117 (1), 112-118, 1995.
  • S. Fiat, E. Bacaksiz, M. Kompitsas, and G. Çankaya, “Temperature and tellurium (Te) dependence of electrical characterization and surface properties for a chalcopyrite structured schottky barrier diode,” J. Alloy. Compd., 585 (1), 178–184, 2014.
  • S. Aksay, M. Polat, T. Özer, S. Köse, and G. Gürbüz, “Investigations on structural, vibrational, morphological and optical properties of CdS and CdS / Co films by ultrasonic spray pyrolysis,” Appl. Surf. Sci., 257 (23), 10072–10077, 2011.
  • A. A. Ivanov, S. G. Galkin, A. V. Kuznetsov, and A. P. Menushenkov, “Physica smooth homogeneous HTSC thin fılms produced by laser deposition with flux separation,” Physica C, 180 (1), 69-72, 1991.
  • V. Smirnov, C. Das, T. Melle, A. Lambertz, M. Hülsbeck, R. Carius and F. Finger, “Improved homogeneity of microcrystalline absorber layer in thin-film silicon tandem solar cells,” Mater. Sci. Eng. B Solid. State. Mater. Adv. Technol., 159 (1), 44–47, 2009.
  • V. K. Jayaraman, Y. M. Kuwabara, A. M. Álvarez, and M. D. L. L. O. Amador, “Importance of substrate rotation speed on the growth of homogeneous ZnO thin films by reactive sputtering,” Mater. Lett., 169 (1), 1–4, 2016.
  • E. Manev, R. Tsekov, and B. Radoev, “Effect of thickness non-homogeneity on the kinetic behaviour of microscopic foam films,” J. Dispers. Sci. Technol., 18 (6), 769–788, 1997.
  • M. Marudachalam, H. Hichri, R. Klenk, R. W. Birkmire, W. N. Shafarman and J. M. Schultz, “Preparation of homogeneous Cu(InGa )Se2 films by selenization of metal precursors in H2Se atmosphere”, Appl. Phys. Lett., 3978(1995), 23–26, 2013.
  • O. Tuna, Y. Selamet, G. Aygun, and L. Ozyuzer, “High quality ITO thin films grown by dc and RF sputtering without oxygen,” Journal of Physics D: Applied Physics, 43 (1), 1-7, 2010.
  • D. H. Kim, M. R. Park, and G. H. Lee, “Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering,” Surf. Coat. Tech., 201 (3), 927–931, 2006.
  • J. C. Lee, K. H. Kang, S. K. Kim, K. H. Yoon, I. J. Park, and J. Song, “RF sputter deposition of the high-quality intrinsic and n-type ZnO window layers for Cu(In,Ga)Se based solar cell applications,” Sol. Energ. Mat. Sol. C., 64 (1), 185–195, 2000.
  • T. Löfstedt, P. Brynolfsson, T. Asklund, T. Nyholm, and A. Garpebring, “Gray-level invariant Haralick texture features,” PLoS ONE, 14 (2), 2019.
  • A. Khan, K. Nivana, T. Poonacha, A. Britt, B. Mcsweeney, N. Santos, G. Donovan, V. Yurk, T. Scully, “Statistical Analysis of GLCM texture features and microstructures in SEM images of crossostrea virginica exposed to atrazine,” Epic Series in Computing, 60 (1), 170-180, 2019.
  • S. H. Kang, Y. K. Kim, D. S. Choi, and Y. E. Sung, “Characterization of electrodeposited CuInSe2 (CIS) film,” Electrochim. Acta, 51 (21), 4433–4438, 2006.
  • H. H. Sheu, Y. T. Hsu, S. Y. Jian, and S. C. Liang, “The effect of Cu concentration in the photovoltaic efficiency of CIGS solar cells prepared by co-evaporation technique,” Vacuum, 131, 278–284, 2016.
  • J. Ramanujam, D. M. Bishop, T. K. Todorov, O. Gunawan, J. Rath, R. Nekovei, and E. Artegiani, “Flexible CIGS, CdTe and a-Si:H based thin film solar cells: A review,” Prog. Mater. Sci., 110, 100619, 2020.
  • S. V. Desarada, P. U. Londhe, S. Chaure, and N. B. Chaure, “CuInGaSe2 (CIGS) thin film on flexible Mo substrates from non-aqueous one-step electrodeposition process,” J. Mater. Sci-Mater. El., 33 (1,) 203–216, 2022.
  • F. Long, W. Wang, J. Du, and Z. Zou, “CIS (CIGS) thin films prepared for solar cells by one-step electrodeposition in alcohol solution,” J. Phys. Conf. Ser., 152, 012074, 2009.
  • P. A. Jones, A. D. Jackson, P. D. Lickiss, R. D. Pilkington, and R. D. Tomlinson, “The plasma enhanced chemical vapour deposition of CuInSe2,” Thin Solid Films, 238 (1), 4–7, 1994.
  • M. Kaleli and C. A. Yavru, “Depth profile crystal orientation determination of Cu(In1−xGax)Se2 thin films by GIXRD method applying skin depth theory,” J. Mater. Sci-Mater. El., 30 (22), 20154–20159, 2019.
  • M. Katerski, A. Mere, V. Kazlauskine, J. Miskinis, A. Saar, L. Matisen, A. Kikas and M. Krunks, “Surface analysis of spray deposited copper indium disulfide films,” Thin Solid Films, 516 (20), 7110–7115, 2008.
  • S. Fiat, I. Polat, E. Bacaksiz, M. Kompitsas, and G. Çankaya, “The influence of annealing temperature and tellurium (Te) on electrical and dielectrical properties of Al/p-CIGSeTe/Mo Schottky diodes,” Curr. Appl. Phys., 13 (6), 1112–1118, 2013.
  • D. A. Aldemir, M. Kaleli, and A. C. Yavru, “Electrical and photoelectric properties of Yb/CIGS thin film Schottky photodiode,” Sensor. Actuat. A Phys., 311, 112091, 2020.
  • A. Guchhait, H. A. Dewi, S. W. Leow, H. Wang, G. Han, F. B. Suhaimi, S. Mhaisalkar, L. H. Wong and N. Mathews, “Over 20% Efficient CIGS-Perovskite Tandem Solar Cells,” ACS Energy Lett., 2 (4), 807–812, 2017.
  • T. J. Jacobsson, A. Hulqvist, S. Svanström, L. Riekehr, U. B. Cappel, E. Unger, H. Rensmo, E. M. J. Johansson, M. Edoff, G. Boschloo, “2-Terminal CIGS-perovskite tandem cells: A layer by layer exploration,” Sol. Energy, 207 (1), 270–288, 2020.
  • W. Z. W. Ismail and K. S. Sim, “Contrast enhancement dynamic histogram equalization for medical image processing application,” Int. J. Imaging. Syst. Technol., 21 (3), 280–289, 2011.
  • R. M. Haralick, K. Shanmugam, I. Dinstein, “Textural Features for Image Classification”, IEEE T. Syst. Man. Cyb., 3(6), 610-321, 1973.
  • A. Demirhan ve İ. Güler, “Özörgütlemeli harita ağları ve gri düzey eş oluşum matrisleri ile görüntü bölütleme,” Gazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi, 25 (2), 285-291, 2010.
  • S. Naghdi, K. Y. Rhee, M. T. Kim, B. Jaleh, and S. J. Park, “Atmospheric chemical vapor deposition of graphene on molybdenum foil at different growth temperatures,” Carbon Lett., 18 (1), 37–42, 2016.
  • P. Fan, G. X. Liang, Z. H. Zheng, X. M. Cai, and D. P. Zhang, “Adjustment of the selenium amount during ion beam sputtering deposition of CIS thin films,” J. Mater. Sci-Mater. El., 21 (9), 897–901, 2010.
  • X. Yang, Z. Zhang, Y. Fu, and Q. Li, “Porous hollow carbon spheres decorated with molybdenum diselenide nanosheets as anodes for highly reversible lithium and sodium storage,” Nanoscale, 7 (22), 10198–10203, 2015.
  • M. Kaleli, C. A. Yavru, M. Koç, S. Akyürekli, ve A. B. Bayram, “Termal Buharlaştırma Yöntemiyle Hazırlanan Ga Katkılı CuInSe2 İnce Filmlerin Yapısal Özelliklerinin İncelenmesi,” Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi, 12 (2), 19–32, 2017.
  • M. Venkatachalam, M. D. Kannan, S. Jayakumar, R. Balasundaraprabhu, and N. Muthukumarasamy, “Effect of annealing on the structural properties of electron beam deposited CIGS thin films,” Thin Solid Films, 516 (20), 6848–6852, 2008.
  • H. Wang, Z. Hang, X. L. Kou, Y. A. Cai, W. Liu, J. B. Pang, C. J. Li, and Y. Sun, “Effect of substrate temperature on the structural and electrical properties of CIGS films based on the one-stage co-evaporation process,” Semicond. Sci. Technol., 25 (5), 055007, 2010.
  • D. Y. Lee, S. Park, and J. Kim, “Structural analysis of CIGS film prepared by chemical spray deposition,” Curr. Appl. Phys., 11 (1), 88-92, 2011.

Investigation of Morphological Differences on CIGS Thin Film Surface by GLCM Image Processing Method

Yıl 2022, Cilt: 17 Sayı: 2, 460 - 477, 25.11.2022
https://doi.org/10.29233/sdufeffd.1125106

Öz

In the study, CIGS semiconductor material was deposited on Mo foils and Mo thin films coated with DC sputtering method on glass by co-evaporation method. The topography and average surface roughness of the two groups of Mo substrates were obtained by the AFM device. The thickness of the CIGS thin films was determined as 1.122 µm from the cross-section SEM image. The structural differences of the samples were determined by taking XRD measurements. SEM images were taken at 5000, 10000, 25000, and 50000 magnifications from the surface of CIGS thin films deposited on Mo foil and thin film substrates. Haralick texture features of the obtained SEM images were examined by GLCM method, the results obtained were evaluated and the effect of substrate Mo topography on the morphology of CIGS thin films was investigated. According to the calculated Haralick features, the changes from large areas to smaller areas were evaluated. In the images obtained from group A samples, it was determined that the energy value in the range of 0.21 and 0.54, the contrast value between 0.15 and 0.35, the correlation value between 0.66 and 0.65 and the homogeneity value between 0.82 and 0.92. It was observed that the same features differed in group B. The effect of substrate difference on structure and morphology is explained by the differences in Haralick texture features of SEM images.

Kaynakça

  • H. Endo, M. Mitsuishi, and T. Miyashita, “Free-standing ultrathin films with universal thickness from nanometer to micrometer by polymer nanosheet assembly,” J. Mater. Chem., 18 (12), 1302–1308, 2008.
  • P. Heremans, A. Tripathi, A. de Jamblinne de Meux, C. P. E. Smiths, B. Hou, G. Pourtois, and H. G. Gelinck, “Mechanical and electronic properties of thin-film transistors on plastic, and their ıntegration in flexible electronic applications,” Adv. Mater., 28 (22), 4266–4282, 2016.
  • A. Moldovan, M. Enăchescu, A. A. Popescu, M. Mihăilescu, C. Neguţu, l. Baschir, G. C. Vasile, D. Savastru, M. S. Iovu, V. I. Verlan, O. T. Bordian, I. M. Vasıle, and N. N. Puşcaş, “Characterization of As2S3 thin surface films using sem and afm methods,” U.P.B. Sci. Bull., Series A, 76 (2), 215-222, 2014
  • M. C. Baykul and A. Balcioglu, “AFM and SEM studies of CdS thin films produced by an ultrasonic spray pyrolysis method,” Microelectron. Eng., 52 (1), 703–713, 2000.
  • B. R. Kumar ve T. S. Rao, “AFM studies on surface morphology, topography and texture of nanostructured zinc aluminum oxide thin films,” Dig. J. Nanomater., 7 (4), 1881-1889, 2012.
  • M. Kaleli, D. A. Aldemir, A. B. Bayram, ve C. A. Yavru, “Ultrasonik sprey piroliz ile üretilen flor katkılı kalay oksit ince filmlerin yapısal, morfolojik, optiksel ve elektriksel analizleri,” Düzce Üniversitesi Bilim ve Teknoloji Dergisi, 7 (3), 2107–2115, 2019.
  • T. Wada, Y. Hashimoto, S. Nishiwaki, T. Satoh, S. Hayashi, T. Negami, H. Miyake, “High-efficiency CIGS solar cells with modified CIGS surface,” Sol. Energ. Mat. Sol. C., 67 (14), 305–310, 2001.
  • T. P. Kumar, S. Saravanakumar, and K. Sankaranarayanan, “Effect of annealing on the surface and band gap alignment of CdZnS thin films,” Appl. Surf. Sci., 257 (6), 1923–1927, 2011.
  • N. E. I. Boukortt, S. Patanè, M. Adouane, and R. AlHammadi, “Numerical optimization of ultrathin CIGS solar cells with rear surface passivation,” Sol. Energy, 220 (1), 590–597, 2021.
  • S. W. Meeks, W. E. Weresin, and H. J. Rosen, “Optical surface analysis of the head-disk-interface of thin film disks,” Transactions of the ASME, 117 (1), 112-118, 1995.
  • S. Fiat, E. Bacaksiz, M. Kompitsas, and G. Çankaya, “Temperature and tellurium (Te) dependence of electrical characterization and surface properties for a chalcopyrite structured schottky barrier diode,” J. Alloy. Compd., 585 (1), 178–184, 2014.
  • S. Aksay, M. Polat, T. Özer, S. Köse, and G. Gürbüz, “Investigations on structural, vibrational, morphological and optical properties of CdS and CdS / Co films by ultrasonic spray pyrolysis,” Appl. Surf. Sci., 257 (23), 10072–10077, 2011.
  • A. A. Ivanov, S. G. Galkin, A. V. Kuznetsov, and A. P. Menushenkov, “Physica smooth homogeneous HTSC thin fılms produced by laser deposition with flux separation,” Physica C, 180 (1), 69-72, 1991.
  • V. Smirnov, C. Das, T. Melle, A. Lambertz, M. Hülsbeck, R. Carius and F. Finger, “Improved homogeneity of microcrystalline absorber layer in thin-film silicon tandem solar cells,” Mater. Sci. Eng. B Solid. State. Mater. Adv. Technol., 159 (1), 44–47, 2009.
  • V. K. Jayaraman, Y. M. Kuwabara, A. M. Álvarez, and M. D. L. L. O. Amador, “Importance of substrate rotation speed on the growth of homogeneous ZnO thin films by reactive sputtering,” Mater. Lett., 169 (1), 1–4, 2016.
  • E. Manev, R. Tsekov, and B. Radoev, “Effect of thickness non-homogeneity on the kinetic behaviour of microscopic foam films,” J. Dispers. Sci. Technol., 18 (6), 769–788, 1997.
  • M. Marudachalam, H. Hichri, R. Klenk, R. W. Birkmire, W. N. Shafarman and J. M. Schultz, “Preparation of homogeneous Cu(InGa )Se2 films by selenization of metal precursors in H2Se atmosphere”, Appl. Phys. Lett., 3978(1995), 23–26, 2013.
  • O. Tuna, Y. Selamet, G. Aygun, and L. Ozyuzer, “High quality ITO thin films grown by dc and RF sputtering without oxygen,” Journal of Physics D: Applied Physics, 43 (1), 1-7, 2010.
  • D. H. Kim, M. R. Park, and G. H. Lee, “Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering,” Surf. Coat. Tech., 201 (3), 927–931, 2006.
  • J. C. Lee, K. H. Kang, S. K. Kim, K. H. Yoon, I. J. Park, and J. Song, “RF sputter deposition of the high-quality intrinsic and n-type ZnO window layers for Cu(In,Ga)Se based solar cell applications,” Sol. Energ. Mat. Sol. C., 64 (1), 185–195, 2000.
  • T. Löfstedt, P. Brynolfsson, T. Asklund, T. Nyholm, and A. Garpebring, “Gray-level invariant Haralick texture features,” PLoS ONE, 14 (2), 2019.
  • A. Khan, K. Nivana, T. Poonacha, A. Britt, B. Mcsweeney, N. Santos, G. Donovan, V. Yurk, T. Scully, “Statistical Analysis of GLCM texture features and microstructures in SEM images of crossostrea virginica exposed to atrazine,” Epic Series in Computing, 60 (1), 170-180, 2019.
  • S. H. Kang, Y. K. Kim, D. S. Choi, and Y. E. Sung, “Characterization of electrodeposited CuInSe2 (CIS) film,” Electrochim. Acta, 51 (21), 4433–4438, 2006.
  • H. H. Sheu, Y. T. Hsu, S. Y. Jian, and S. C. Liang, “The effect of Cu concentration in the photovoltaic efficiency of CIGS solar cells prepared by co-evaporation technique,” Vacuum, 131, 278–284, 2016.
  • J. Ramanujam, D. M. Bishop, T. K. Todorov, O. Gunawan, J. Rath, R. Nekovei, and E. Artegiani, “Flexible CIGS, CdTe and a-Si:H based thin film solar cells: A review,” Prog. Mater. Sci., 110, 100619, 2020.
  • S. V. Desarada, P. U. Londhe, S. Chaure, and N. B. Chaure, “CuInGaSe2 (CIGS) thin film on flexible Mo substrates from non-aqueous one-step electrodeposition process,” J. Mater. Sci-Mater. El., 33 (1,) 203–216, 2022.
  • F. Long, W. Wang, J. Du, and Z. Zou, “CIS (CIGS) thin films prepared for solar cells by one-step electrodeposition in alcohol solution,” J. Phys. Conf. Ser., 152, 012074, 2009.
  • P. A. Jones, A. D. Jackson, P. D. Lickiss, R. D. Pilkington, and R. D. Tomlinson, “The plasma enhanced chemical vapour deposition of CuInSe2,” Thin Solid Films, 238 (1), 4–7, 1994.
  • M. Kaleli and C. A. Yavru, “Depth profile crystal orientation determination of Cu(In1−xGax)Se2 thin films by GIXRD method applying skin depth theory,” J. Mater. Sci-Mater. El., 30 (22), 20154–20159, 2019.
  • M. Katerski, A. Mere, V. Kazlauskine, J. Miskinis, A. Saar, L. Matisen, A. Kikas and M. Krunks, “Surface analysis of spray deposited copper indium disulfide films,” Thin Solid Films, 516 (20), 7110–7115, 2008.
  • S. Fiat, I. Polat, E. Bacaksiz, M. Kompitsas, and G. Çankaya, “The influence of annealing temperature and tellurium (Te) on electrical and dielectrical properties of Al/p-CIGSeTe/Mo Schottky diodes,” Curr. Appl. Phys., 13 (6), 1112–1118, 2013.
  • D. A. Aldemir, M. Kaleli, and A. C. Yavru, “Electrical and photoelectric properties of Yb/CIGS thin film Schottky photodiode,” Sensor. Actuat. A Phys., 311, 112091, 2020.
  • A. Guchhait, H. A. Dewi, S. W. Leow, H. Wang, G. Han, F. B. Suhaimi, S. Mhaisalkar, L. H. Wong and N. Mathews, “Over 20% Efficient CIGS-Perovskite Tandem Solar Cells,” ACS Energy Lett., 2 (4), 807–812, 2017.
  • T. J. Jacobsson, A. Hulqvist, S. Svanström, L. Riekehr, U. B. Cappel, E. Unger, H. Rensmo, E. M. J. Johansson, M. Edoff, G. Boschloo, “2-Terminal CIGS-perovskite tandem cells: A layer by layer exploration,” Sol. Energy, 207 (1), 270–288, 2020.
  • W. Z. W. Ismail and K. S. Sim, “Contrast enhancement dynamic histogram equalization for medical image processing application,” Int. J. Imaging. Syst. Technol., 21 (3), 280–289, 2011.
  • R. M. Haralick, K. Shanmugam, I. Dinstein, “Textural Features for Image Classification”, IEEE T. Syst. Man. Cyb., 3(6), 610-321, 1973.
  • A. Demirhan ve İ. Güler, “Özörgütlemeli harita ağları ve gri düzey eş oluşum matrisleri ile görüntü bölütleme,” Gazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi, 25 (2), 285-291, 2010.
  • S. Naghdi, K. Y. Rhee, M. T. Kim, B. Jaleh, and S. J. Park, “Atmospheric chemical vapor deposition of graphene on molybdenum foil at different growth temperatures,” Carbon Lett., 18 (1), 37–42, 2016.
  • P. Fan, G. X. Liang, Z. H. Zheng, X. M. Cai, and D. P. Zhang, “Adjustment of the selenium amount during ion beam sputtering deposition of CIS thin films,” J. Mater. Sci-Mater. El., 21 (9), 897–901, 2010.
  • X. Yang, Z. Zhang, Y. Fu, and Q. Li, “Porous hollow carbon spheres decorated with molybdenum diselenide nanosheets as anodes for highly reversible lithium and sodium storage,” Nanoscale, 7 (22), 10198–10203, 2015.
  • M. Kaleli, C. A. Yavru, M. Koç, S. Akyürekli, ve A. B. Bayram, “Termal Buharlaştırma Yöntemiyle Hazırlanan Ga Katkılı CuInSe2 İnce Filmlerin Yapısal Özelliklerinin İncelenmesi,” Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi, 12 (2), 19–32, 2017.
  • M. Venkatachalam, M. D. Kannan, S. Jayakumar, R. Balasundaraprabhu, and N. Muthukumarasamy, “Effect of annealing on the structural properties of electron beam deposited CIGS thin films,” Thin Solid Films, 516 (20), 6848–6852, 2008.
  • H. Wang, Z. Hang, X. L. Kou, Y. A. Cai, W. Liu, J. B. Pang, C. J. Li, and Y. Sun, “Effect of substrate temperature on the structural and electrical properties of CIGS films based on the one-stage co-evaporation process,” Semicond. Sci. Technol., 25 (5), 055007, 2010.
  • D. Y. Lee, S. Park, and J. Kim, “Structural analysis of CIGS film prepared by chemical spray deposition,” Curr. Appl. Phys., 11 (1), 88-92, 2011.
Toplam 44 adet kaynakça vardır.

Ayrıntılar

Birincil Dil Türkçe
Konular Metroloji,Uygulamalı ve Endüstriyel Fizik
Bölüm Makaleler
Yazarlar

Celal Alp Yavru 0000-0003-4932-0382

İsmail Serkan Üncü 0000-0003-4345-761X

Murat Kaleli 0000-0002-3290-2020

Salih Akyürekli 0000-0001-6005-667X

Yayımlanma Tarihi 25 Kasım 2022
Yayımlandığı Sayı Yıl 2022 Cilt: 17 Sayı: 2

Kaynak Göster

IEEE C. A. Yavru, İ. S. Üncü, M. Kaleli, ve S. Akyürekli, “CIGS İnce Film Yüzeyindeki Morfolojik Farklılıkların GLCM Görüntü İşleme Yöntemi ile İncelenmesi”, Süleyman Demirel University Faculty of Arts and Science Journal of Science, c. 17, sy. 2, ss. 460–477, 2022, doi: 10.29233/sdufeffd.1125106.